Abstract: The process of fabricating titanium nitride powders in submicron size by combustion deoxidizing synthesis was investigated, and a direct synthesis process without the following mechanical crushing as usual was established. The obtained granules range from 0.2~1.0μm and have an average size of 0.5~0.6μm. It is concluded that the TiN powders with much less agglomeration during high temperature synthesis are mainly owed to the mechanical segmentation of MgO by-product. In oder to obtain titanium nitride powder with desirable both N/Ti ratio and grain size,it's necessary to properly control the synthesis temperature.