Abstract: The TiN film is prepared on the substrate of Cr12MoV steel by means of plasma immersion ion implantation-ion beam assisted deposition (PIII-IBAD). The structure and the tribological property including microhardness, friction coefficient and wearing traces are investigated respectively with X-ray photoelectron spectroscopy (XPS), hardness tester, sliding friction tests and scanning electron microscopy (SEM). The results indicate that the structure of the film is consisted of TiN, TiO₂ and Ti₂O₃ and the film possesses high hardness up to Hv3200 and high wearing capacity.