电沉积法制备ZrO2薄膜的工艺研究

Fabrication Process of ZrO2 Film by Electrodeposition

    摘要
  • 摘要: 研究了水溶液中电沉积ZrO2薄膜的工艺,系统分析了镀液成分、pH值、电流密度及沉积时间对电沉积ZrO2薄膜的影响规律,并分析了薄膜的厚度、成分和形貌等。研究结果表明,在硝酸锆水溶液中加入一定量的络合剂和添加剂,可以得到与基体结合好、分布均匀的ZrO2薄膜。

     

    Abstract: ZrO2 film was electrodeposited in Zr(NO3)4 solution. The effects of bath composition, pH, current density and plating time on ZrO2 film were studied. The composition, morphology and thickness of ZrO2 film were also investigated.Resultsshowed that high quility ZrO2 film could be obtained from the aqueous solution by addition of proper complex and additives.

     

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