液相沉积法制备类金刚石膜的研究

Study on Diamond-like Carbon Film Prepared by Liquid-deposition

摘要: 探讨了用液相法在钛合金表面沉积制备类金刚石膜的可能性,研究了沉积膜工艺条件对膜的影响,得出了适宜的沉积条件。结果表明,通过液相法可以沉积制备得到DLC膜,但与沉积条件有着密切的关系。当电压为1600~1850 V、温度为60~62℃、电极间距为8~10 mm、沉积时间大于36 h时,才能在钛合金表面得到完整的DLC绝缘膜。

Abstract: A new method to prepare diamond- like carbon film on Ti alloy surface by liquid-deposition is introduced.The influence of parameters on the films is discussed and the proper parameters are determined.The results show that DLC can be deposited on Ti alloy by the method of liquid- deposition and the deposition condition has a strong impact on the deposited DLC film.Only when the voltage is 1600~1850 V the temperature is 60~62℃the distance between electrodes is 8~10 mm and the deposition time is more than 36 hoursan insulating DLC film can form on the Ti alloy surface.