微弧氧化法制备BaTiO<sub>3</sub>薄膜的微观结构分析

微弧氧化法制备BaTiO₃薄膜的微观结构分析

基金项目:

武器装备预研基金项目(51412020203JW1609)

详细信息

College of Mechanical Engineering, South China University of Technology, Guangzhou 510640, China

摘要: 利用X射线衍射仪、透射电镜和能谱仪(EDS)等对采用微弧氧化技术在钛衬底上制备的钛酸钡铁电薄膜的微观结构进行了分析。结果表明,Ba(OH)2浓度为0.2 mol/L、电流密度为5A/cm²、电源频率为250 Hz、微弧氧化时间为30 min制备的薄膜以六方相、四方相的BaTiO₃和非晶相为主;经过1200℃退火8 h后,薄膜中的BaTiO₃以四方相为主,非晶相消失,但部分六方相仍然保留。
- 微弧氧化 /
- 铁电薄膜 /
- BaTiO₃ /
- TEM
Abstract: The phase structure and microstructure of BaTiO₃ films,prepared through microarc oxidation,are analyzed by means of X-ray diffraction(XRD),transmission electron microscope(TEM) and energy dispersive X-ray spectroscopy(EDS).The re-sults showed that the films are mainly composed of primitive tetragonal and primitive hexagonal BaTiO₃and amorphous phase when they were deposed in 0.2 mol/l Ba(OH)₂ solution with current density of 5A/cm² and frequency of 250Hz for 30 minutes.The films are mainly composed of primitive tetragonal BaTiO₃,the amorphous phase disappeared and primitive hexagonal Ba-TiO₃ remained partly,when they were annealed at 1200℃for 8 hours.
- Microarc oxidation /
- Ferroelectric film /
- BaTiO₃ /
- TEM