Microstructure Analysis of BaTiO3 Films Prepared through Microarc Oxidation
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摘要: 利用X射线衍射仪、透射电镜和能谱仪(EDS)等对采用微弧氧化技术在钛衬底上制备的钛酸钡铁电薄膜的微观结构进行了分析。结果表明,Ba(OH)2浓度为0.2 mol/L、电流密度为5A/cm2、电源频率为250 Hz、微弧氧化时间为30 min制备的薄膜以六方相、四方相的BaTiO3和非晶相为主;经过1200℃退火8 h后,薄膜中的BaTiO3以四方相为主,非晶相消失,但部分六方相仍然保留。Abstract: The phase structure and microstructure of BaTiO3 films,prepared through microarc oxidation,are analyzed by means of X-ray diffraction(XRD),transmission electron microscope(TEM) and energy dispersive X-ray spectroscopy(EDS).The re-sults showed that the films are mainly composed of primitive tetragonal and primitive hexagonal BaTiO3and amorphous phase when they were deposed in 0.2 mol/l Ba(OH)2 solution with current density of 5A/cm2 and frequency of 250Hz for 30 minutes.The films are mainly composed of primitive tetragonal BaTiO3,the amorphous phase disappeared and primitive hexagonal Ba-TiO3 remained partly,when they were annealed at 1200℃for 8 hours.
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Keywords:
- Microarc oxidation /
- Ferroelectric film /
- BaTiO3 /
- TEM
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