低温共烧氧化铝/玻璃复合基板材料的研究

Study of Low Temperature Cofired Al₂O₃/Glass Composite Substrate Material

摘要: 以低软化点的钙硼硅酸盐玻璃和氧化铝粉末为原料,制备了氧化铝/玻璃低温共烧复合基板材料。所需的玻璃粉体采用溶胶-凝胶法制备。研究了烧结温度和氧化铝含量对复合材料的烧结特性、介电性能以及力学性能的影响。结果表明,当氧化铝质量分数为50%,复合材料经950℃、保温2 h烧结后,其ε_r=5.92,tanδ=5.7×10^-4,ρ=10¹²Ω.cm,抗弯强度σ=167.82 MPa,热膨胀系数α=4.86×10^-6/℃,可望作为低温共烧多层陶瓷基板材料应用。

Abstract: The Al₂O₃/glass low temperature sintering composite substrate material was prepared with low softening temperature CaO-B₂O₃-SiO₂ glass and Al₂O₃ powder as raw materials.The glass powder is prepared by sol-gel method.The influence of sintering temperature and the Al₂O₃ content on the sintering properties,dielectric properties and mechanical properties was investigated.The results show that when the Al₂O₃ content is 50% and after the composite material were sintered at 950℃ for 2 hours,the ε_r reaches 5.92,tanδ reaches 5.7×10^-4,the insulation resistivity reaches 10¹²Ω·cm,flexural strength σ reaches 167.82 MPa and thermal expand coefficient α reaches 4.86×10^-6/℃.This composite material is hopeful to have application in low temperature sintering multilayer ceramic substrate.