Abstract: (Zr,Al)N coatings with different Al contents were deposited on Si(100) by reactive RF magnetron sputtering method.Energy dispersive spectroscopy,X-ray diffraction,scanning electron microscopy,nanoindentation were employed to investigate the chemical composition,microstructure,mechanical and oxidation resistance properties of the coating film.The results indicate that as the Al content increases,the film structure changes from type B1(NaCl) to B4(ZnS),the lattice distances decrease for both B1 and B4 structure,and the mechanical character of the films increase first,and then decrease,which is related to the change of the structure of the films.The introduction of Al improves the oxidation-resistance of(Zr,Al)N films.