立方氮化硼薄膜的制备工艺

Preparing Techniques of Cubic Boron Nitride Thin Film

    摘要
  • 摘要: 介绍了几种立方氮化硼(C-BN)薄膜的制备工艺,并对薄膜中立方氮化硼相形成的影响因素进行了讨论。

     

    Abstract: The Techniqnes preparing cubic boron nitride thin film were introduced.The factors influencing the form of cubic boron nitride in the thin film was discussed.

     

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