组合薄膜制备技术在热电材料中的应用

Combinatorial Technologies in the Fabrication of Thermoelectric Films

摘要: “组合技术”是现代的新材料开发的手段。介绍了一些新的组合技术,如:“组合激光分子束外延技术”和“组合激光溅射制膜技术”,并采用“组合激光溅射制膜技术”,成功制备了高质量La_1-xCe_xVO₃(0≤x≤1)成分梯度薄膜。采用组合热电测量系统和组合XRD系统测量了La_1-xCe_xVO₃(0≤x≤1)成分梯度薄膜的热电性能和晶体结构。“组合激光溅射制膜技术”被证明是非常高效、精确的新材料薄膜研究方法,具有光明的前景。

Abstract: Combinatorial technology is a powerful tool for new material exploration.Some new combinatorial technologies,such as combinatorial laser molecular beam epitaxy(CLMBE) and combinatorial pulsed laser deposition(CPLD),are introduced in this paper.La_1-xCe_xVO₃(0≤x≤1) composition-spread films were fabricated successfully by CPLD,while their thermoelectric properties and structures were evaluated by multi-channel thermoelectric measurement system and concurrent X-ray analysis respectively.Combinatorial technologies are proving to be an efficient,low-cost tool in synthesis and characterization of thermoelectric composition-spread films.