摘要:
针对薄膜材料厚度无损测试技术,提出一种三电极平行板电容传感器薄膜测厚方法。具体采用了三电极平行板电容器结构,该电容传感器含有三个相同的几何尺寸是毫米级的平板电极探头,电极之间的间距可变。依据电容原理和保角变换方法建立理论模型。通过Fortran语言编写算法,将得出的计算结果与传统方法进行比较。结果表明用此方法检测薄膜厚度变化,不仅继承了传统电容测厚技术具有的结构简单,操作快捷,便于控制,低功耗,低成本等优点,还大大提高了薄膜厚度检测的灵敏度。
Abstract:
To improve the accuracy of non-destructive thickness measurement,this paper presented a thickness-measurement method based on a capacitance sensor structure.Different from the traditional capacitance thickness-measurement system,it is a three-electrode capacitor system,containing three probes,which are in the same size and in millimeter size,besides,each is movable.Use conformal mapping theory and capacitance principle to establish mathematical model,programe algorithm in Fortran language.Compared with traditional methods,this method not only inherits the advantanges of traditional measurement system,simple structure,low power consumption,easy operation and control,low cost etc,but also has higher sensitivity,which is very important in thickness measurement.
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