Abstract: Basing on improving harsh terms of alkoxide sol-gel process,dense conductive La_0.5Ca_0.5MnO₃ films on SiO₂/Si(110) silicon substrates were fabricated by sol-gel method with corresponding inorganic salts.The samples were characterised by means of X-ray diffraction,SEM and TEM.CMR effect of the sample were studied against R-T curves.The results show that the films have a pseudocubic perovskite structure with uniform surface and grain size(about 30nm) was increased with annealing temperature.The resistivity at room temperature of La_0.5Ca_0.5MnO₃ film was 0.0303Ω·cm by four-probe method.Magnetoresistance peak at 210K reached 14.5%.