Abstract: The microstructure and component of indium tin oxide (ITO) powder are studied， and the influences of different state powders and preparation techniques on the ITO targets are compared. The results show that the ITO nano-powder possesses body center cubic In₂O₃ structure when is annealed at temperature below 800℃, and is composed of In₂O₃ and SnO₂ phases when is annealed at 1100℃. After spray drying， the solid sphere granulated powder is obtained， which possesses a suitable particles grade match， and the excellent ITO targets with high density are prepared by using atmosphere sintering.