光纤表面Fe-C敏感膜的制备及腐蚀行为研究
Preparation and Corrosion Behavior of Fe-C Sensitive Film on Optical Fiber
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摘要: 金属敏感膜的制备是金属敏感膜光纤传感器的研究重点,本文介绍了这类传感器的原理,并以磁控溅射制备Cr膜作为中间导电层、然后电镀的方法在光纤上制备了Fe-C敏感膜,对其结构和表面形貌进行了分析。通过1%HCl溶液的腐蚀实验发现,在腐蚀过程中输出光功率出现增大现象,而且不同厚度Fe-C敏感膜的光信号响应时间不同。通过微观的腐蚀过程连续观察发现,当敏感膜腐蚀到一定程度后,出现从光纤上脱落的现象。Abstract: The preparation of metal sensitive film is the focus of research in optical fiber sensor with metal sensitive film.In this paper,the principal of this kind of sensors was introduced and the Fe-C sensitive film was prepared by the method of electroplating on optical fiber with Cr film as middle conductive layer made by magnetron sputtering.The structure of Fe-C sensitive film was analyzed by means of SEM and XRD.Corrosion behavior of Fe-C sensitive film in 1% HCl solution shows that output power was increased sharply in corrosion process and the signal response time of Fe-C sensitive film in different thickness was different.Microscopic observation in corrosion process found that the sensitive film would be peeled piece by piece when it was corroded to some extent.