SiC半导体材料产业发展现状
Development of SiC Semiconductor Materials Industry
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摘要: 本文介绍了SiC半导体材料的性能优势,应用前景和制备方法,重点对物理气相传输法(PVT)制备SiC单晶做了描述,分析了SiC单晶材料国内外产业发展现状及发展瓶颈,同时对SiC单晶材料的发展趋势进行了展望。Abstract: This paper has described SiC semiconductor material performance advantages, prospect in application and preparation methods, and give special focus on the PVT preparation method of SiC single crystal, the development status of SiC single crystal industry at home and abroad, as well as the bottlenecks were analyzed and the development trends of SiC materials industry was prospected.