Nb10Zr靶材制备工艺研究

Study on Preparation Process of Nb10Zr Target

  • 摘要: 研究了Nb10Zr铸锭预处理、锻造、轧制、热处理等工艺及Nb10Zr靶材的制备工艺。结果表明,1450℃保温90 min的铸锭预处理,可以改善锻造塑性;1 300℃径向圆周锻造、1 000℃轧制及1 200~1 450℃热处理,可以避免锻造和轧制开裂,晶粒度达到8级且组织均匀。

     

    Abstract: Pretreatment, forging, rolling and heat treatment for Nb10Zr ingot and the preparation process of Nb10Zr target were investigated. Experiment results showed that when the ingot was pretreated at 1 450 ℃ for 90 min, its plasticity would be improved; circular forging at 1 300 ℃, rolling at 1 000 ℃ and heat treatment at 1 200~1 450 ℃ could prevent the material from cracking in the process of forging and rolling. The grain size of Nb10Zr target was of 8 grade, and the microstructure was uniform.

     

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