Abstract: Technical characteristic of high purity tantalum powder production is analyzed, and an improved production method for high purity tantalum powder for tantalum target is introduced. That high-temperature dehydrogenation (900~950 ℃) and low-temperature deoxygenation (700~800 ℃) are conducted at different stages is beneficial to the control of the contents of hydrogen, oxygen and magnesium in the tantalum powder and the tantalum powder particle size, and the tantalum powder is characterized by low content of oxygen and small particle size. The vacuum heat treatment (700~800 ℃) can be adopted to remove residual metal magnesium after the deoxygenation and such impurities as H and F entrained during the pickling, while assuring there is no growing-up of the particles.