一种钽靶材织构评价方法的模型构建

基金项目:

国家02重大科技专项《300mm硅片工艺用溅射靶材研发与产业化》(2009ZX02031)

详细信息

Model Establishing of an Evaluation Method for Tantalum Target Texture

1. NRMMI State Key Laboratory of Special Rare Metal Materials, Shizuishan 753000, China;
2. CNMC NingXia Orient Group Co., Ltd., Shizuishan 753000, China

摘要: 研究了一种钽靶材织构评价方法模型, 关注{100}、{110}、{111}三种面织构的组份含量和分布均匀性, 并对三种织构进行了定义, 规定晶界角度定义为≤2°, 组份含量取与标准织构取向差小于15°的晶粒的百分含量;同时, 对取样方法与测试方法进行了规定, 依据本模型, 可通过织构分布折线图、15°取向图和IPF图来对钽靶材单点与整靶织构分布情况进行综合评价。
- 钽靶材 /
- 织构评价 /
- 方法构建
Abstract: The model of an evaluation method for tantalum target texture was establisheds, and component contents and distribution uniformity of { 100 }, { 110 } and { 111 } textures were investigated, and the grain boundary angle was decided to be no more than 2°. Texture contents were the percent of grains with the standard texture orientation deviation less than 15°. Meanwhile, sampling method and testing method were regulated. According to the model, single-point texture distribution and multipoint texture distribution could be evaluated by statistical chart, 15°orientation graph and IPF coloring map.
- tantalum target /
- texture evaluation /
- method establishment