压力注浆成型大规格ITO靶材坯体研究

Study of Pressure Slip Casting Process of Large ITO Green Body

  • 摘要: 以ITO粉体为原料,使用压力注浆成型技术制备了ITO靶材坯体。研究了浆料粘度、固含量、加压时间、真空处理等因素对ITO靶材坯体结构的影响。结果表明,使用3步加压时,通过变单孔注浆模具为双孔模具,可显著提高注浆效率,同时解决坯体空心的问题;适当延长中压保压时间和提高浆料固含量可使大规格坯体密度得到不同程度的提高;所得高密度坯体在1 590℃烧结,可制备出相对密度达99.87%的较大规格ITO靶材。

     

    Abstract: ITO green body was prepared from ITO powder by pressure slip casting. The influences of factors including slurry viscosity, solid content, pressure slip casting process and vacuum treatment on the structures of the ITO green body were studied.The results showed that slipping efficiency was advanced by remodeling mould from single slipping-hole to two ones and hollow problem of green body was solved at the same time when three-step casting process was used. The density of large ITO green body was improved by prolonging lasting-time of middle slipping stage and by increasing the content of slurry. Large ITO target with high relative density of 99.87% was prepared by sintering ITO green body of high density at 1 590℃.

     

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