Abstract: A method of producing super fine tantalum powder for tantalum target material was introduced, which was to high temperature sinter, hydrogenize, stirring ball mill, pickle and dehydrogenize and oxygen reduce the wasted tantalum powders from the production of capacitor tantalum powders. The tantalum powder particle size range was concentrated and D50 < 5 μm. Besides, the contents of imparities such as oxygen, potassium and sodium were low and the bulk density was high.