ITO靶材第二相的提取方法与分析

Methods of Extracting and Analyzing of Second-phase of ITO Target

摘要: 通过将ITO靶材粉碎、过筛后用王水长时间腐蚀的方法,提取出腐蚀产物。以进口A靶、B靶和C靶粉碎后的腐蚀产物为研究对象,通过SEM、TEM、XRD等检测手段研究3种靶材腐蚀产物的形貌、物相结构和组成成分等。结果表明,腐蚀产物均为第二相,其中A靶第二相为近似等轴体的In₄Sn₃O₁₂,B靶和C靶第二相可能同时含有近似等轴体In₄Sn₃O₁₂和“窄片”In₂SnO₅,并且A靶第二相比B靶多出约8.32%,比C靶多出约4.48%。

Abstract: Corrosion product was prepared by sifting out and eroding crushed ITO target powders with aqua regia. Morphologies, structures and components of corrosion products of foreign targets of target-A, target-B and target-C were studied by SEM, TEM and XRD.Resultsshowed that the products were second-phase; the second-phase of target-A was approximate equiaxed, which was considered as In₄Sn₃O₁₂ and the second-phase of target-B and target-C contain both approximate isometric In₄Sn₃O₁₂ and narrow slice In₂SnO₅; the amount of second-phase of target-A was 8.32% more than that of target-B and 4.48% that of target-C.