Abstract: Compressive creep behavior and mechanism at room temperature of Ti-6 Al-3 Nb-2 Zr-1 Mo alloy under different applied stresses were investigated, the creep curves were fitted, the critical value of the second stage of creep calculated, the microstructures of the alloy after compression at different stress levels observed by TEM, and the dislocation slip types studied. The results showed that the compressive creep curve of Ti-6 Al-3 Nb-2 Zr-1 Mo titanium alloy conformed to the time-strengthening model at room temperature, and the critical value of the second stage of creep was 518 MPa, which laid a foundation for the safety design of deep-sea equipment. The creep mechanism of Ti-6 Al-3 Nb-2 Zr-1 Mo titanium alloy at room temperature was mainly dislocation slip, and the slip system with the most easy starting was basal slip, followed by prismatic slip and pyramidal slip. By microstructure and creep curve analysis, it was concluded that pyramidal slip had a great contribution to creep deformation.