Abstract: The detection method of various trace elements in nickel-based superalloys is developed based on the valence theory of NH₃ coordination. Zn is taken as an example. With NH₃ as the reaction gas, Zn reacts with NH₃, and the product ion Zn(NH₃)_x can only be detected, which can eliminates the multi-atomic ion interference. Through determining the ion product and optimizing the velocity of the air flow and rejection parameter, the detection limit of Zn is as low as 0.13 μg/g with the standard deviation of 4.2%-5.1%, and the recovery rate is 93.0%-103.0%. The method processes low detection limit, high sensitivity, and high accuracy, and is hopeful to be applied to the detection of various trace elements (such as Ag, Cu, V, and Fe) in nickel-based superalloys.