一种热加工钽板材的织构分析

李兆博, 马小文, 汪凯, 张九海, 杨烈, 李新钰

李兆博, 马小文, 汪凯, 张九海, 杨烈, 李新钰. 一种热加工钽板材的织构分析[J]. 材料开发与应用, 2021, 36(5): 56-61.
引用本文: 李兆博, 马小文, 汪凯, 张九海, 杨烈, 李新钰. 一种热加工钽板材的织构分析[J]. 材料开发与应用, 2021, 36(5): 56-61.
LI Zhaobo, MA Xiaowen, WANG Kai, ZHANG Jiuhai, YANG Lie, LI Xinyu. Texture Analysis on the Hot Worked Tantalum Sheets[J]. Development and Application of Materials, 2021, 36(5): 56-61.
Citation: LI Zhaobo, MA Xiaowen, WANG Kai, ZHANG Jiuhai, YANG Lie, LI Xinyu. Texture Analysis on the Hot Worked Tantalum Sheets[J]. Development and Application of Materials, 2021, 36(5): 56-61.

一种热加工钽板材的织构分析

详细信息
    作者简介:

    李兆博,男,1980年生,学士,高级工程师,主要从事钽、铌及其合金的制品、靶材加工工艺与组织性能研究。E-mail:752327649@qq.com.cn

  • 中图分类号: TG146.416

Texture Analysis on the Hot Worked Tantalum Sheets

  • 摘要: 对2枚12英寸钽板材进行了全面的织构分析,并与制备工艺、评价结果相结合,讨论三者之间的关系。制备工艺决定了织构组份,并通过织构分析全面展现二者关系,最后通过评价来进行验证。钽板材使用1 000℃热加工工艺制备,{100}织构占优,织构分布均匀性改善明显,但最终因溅射薄膜均匀性(Uniformity)不良未通过评价,此外,与溅射机台Base Line钽板材织构组份不匹配也是主要原因。
    Abstract: A comprehensive texture analysis on two pieces of 12-inch tantalum sheets was carried out, and the relationship among preparation process, evaluation results and texture analysis was discussed. The preparation process determined the texture components, and their relationship could be comprehensively displayed through texture analysis, which would be verified by evaluation. The tantalum sheets were prepared by hot worked process at 1 000℃, and the {100} texture component was dominant. The uniformity of texture distribution was improved significantly. However, the test evaluation failed because of the poor uniformity of sputtering film. In addition, the mismatch of the texture components with Base Line tantalum targets was also a main reason.
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出版历程
  • 收稿日期:  2021-01-05
  • 刊出日期:  2021-10-24

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