Abstract:
A comprehensive texture analysis on two pieces of 12-inch tantalum sheets was carried out, and the relationship among preparation process, evaluation results and texture analysis was discussed. The preparation process determined the texture components, and their relationship could be comprehensively displayed through texture analysis, which would be verified by evaluation. The tantalum sheets were prepared by hot worked process at 1 000℃, and the 100 texture component was dominant. The uniformity of texture distribution was improved significantly. However, the test evaluation failed because of the poor uniformity of sputtering film. In addition, the mismatch of the texture components with Base Line tantalum targets was also a main reason.