Study of Low Temperature Cofired Al₂O₃/Glass Composite Substrate Material

The Al₂O₃/glass low temperature sintering composite substrate material was prepared with low softening temperature CaO-B₂O₃-SiO₂ glass and Al₂O₃ powder as raw materials.The glass powder is prepared by sol-gel method.The influence of sintering temperature and the Al₂O₃ content on the sintering properties,dielectric properties and mechanical properties was investigated.The results show that when the Al₂O₃ content is 50% and after the composite material were sintered at 950℃ for 2 hours,the ε_r reaches 5.92,tanδ reaches 5.7×10^-4,the insulation resistivity reaches 10¹²Ω·cm,flexural strength σ reaches 167.82 MPa and thermal expand coefficient α reaches 4.86×10^-6/℃.This composite material is hopeful to have application in low temperature sintering multilayer ceramic substrate.