Preparation of ITO Nano Powder by Arc Evaporating and Development of Ultra High Density ITO Target

ITO nano-powders was prepared by arc evaporating with 99.99% In and Sn as raw materials.The prepared powder has single cubic In₂O₃ phase in tetragonal and near-sphere pattern.The particle size of the powder is 30~70nm and the dispersity of the powder is good.ITO target with grain size of 5~10μm was prepared with the powder by non-pressure sintering.The ITO target has a homogeneous structure,a relative density of 99.74%,and a average resistivity of 1.52×10^-4Ω·cm.