Experimental Study on Micro-Mechanical Properties of Single Crystal Silicon Based on TriboIndenter

In order to evaluate the micro mechanical properties of single crystal silicon which are commonly applied in MEMS,a serial of nano-indentation were performed on TriboIndenter,a full featured nano-mechanical test instrument.The results revealed that the micro-mechanical properties of single crystal silicon vary under a certain micro normal load,less than 2400μN.Pile-up and brittle failure occurred on single crystal silicon against micro deformation.