The Progress of Research on the Film of Strontium Titanate:Preparations and Applications

The progress of the research on the film of strontium titanate(ST) is reviewed.Included are the five preparation methods Such as PECVD,radio frequency magnetron sputtering,MOCVD,PLD,and sol-gel.The application as capacitance-voltage sensitive dual-functional materials,CMOS devices,thermal components,hydrogen gas sensor and PZT ferroelectric thin film electrodes are introduced.The subjects needing further research such as control of crystal grain boundary,control of interface,leakage conductance mechanism,fatigue mechanism,non-linear effect,preparation technology for the film of high quality and large area,are proposed.