LIU Xi-bo, CHEN Pai-ming, YANG Shuo. Preparation of Indium Tin Oxide Ceramic Targets[J]. Development and Application of Materials, 2011, 26(3): 26-29. DOI: 10.19515/j.cnki.1003-1545.2011.03.008
Citation: LIU Xi-bo, CHEN Pai-ming, YANG Shuo. Preparation of Indium Tin Oxide Ceramic Targets[J]. Development and Application of Materials, 2011, 26(3): 26-29. DOI: 10.19515/j.cnki.1003-1545.2011.03.008

Preparation of Indium Tin Oxide Ceramic Targets

  • The microstructure and component of indium tin oxide (ITO) powder are studied, and the influences of different state powders and preparation techniques on the ITO targets are compared. The results show that the ITO nano-powder possesses body center cubic In2O3 structure when is annealed at temperature below 800℃, and is composed of In2O3 and SnO2 phases when is annealed at 1100℃. After spray drying, the solid sphere granulated powder is obtained, which possesses a suitable particles grade match, and the excellent ITO targets with high density are prepared by using atmosphere sintering.
  • loading

Catalog

    /

    DownLoad:  Full-Size Img  PowerPoint
    Return
    Return