A Study on Fabrication and Modification of PZT Thin Films

Lead zirconate titanate(PZT) films for its excellent ferroelectric and piezoelectric properties have been attended extensively. This paper reviewed main preparation methods of the PZT films,such as RF magnetron sputtering method,pulse laser deposition method,sol-gel method and metal organic chemical vapor deposition. Influence of process parameters on the structure and performance of PZT thin films is discussed and improvement of fatigue performance by doping is explored.