ZHANG Guo-Jun, WANG Kai, LI Gui-Peng, REN Xiao. Processing Technology of Spin Coating Process Niobium Target[J]. Development and Application of Materials, 2014, 29(6): 54-57. DOI: 10.19515/j.cnki.1003-1545.2014.06.011
Citation: ZHANG Guo-Jun, WANG Kai, LI Gui-Peng, REN Xiao. Processing Technology of Spin Coating Process Niobium Target[J]. Development and Application of Materials, 2014, 29(6): 54-57. DOI: 10.19515/j.cnki.1003-1545.2014.06.011
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Processing Technology of Spin Coating Process Niobium Target

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  • Structures of spin coating niobium target from different processing technologies were studied. The results showed that through muti-direction forging, with the deformation of 80% and heat treatment process of 1050℃ × 90 min, the prepared targets have a homogeneous equiaxed structure and a grain size of 40-100 μm.
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