Comparison Study on Preparation Process and Performance of ITO Target by Gasified Powders and Co-precipitated Powders
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Graphical Abstract
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Abstract
Under the same technological conditions, ITO targets were prepared with gasified ITO powders and co-precipitated ITO powders by such processes as ball-milling, prilling and molding. The main performances of intermediate products and targets prepared by gasified and co-precipitated powders were studied. The result shows that after mould pressing and CIP, the density of ITO green body prepared from co-precipitated powders is lower than that of ITO green body from gasified powders. The grain size and sintering activity of the co-precipitated power are smaller and higher, so the targets of high density could be obtained under less demanding conditions.
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