YANG Shuo, LIU Guanpeng, ZHAO Yanfei, DUAN Haiyang, ZHANG Weiming. Comparison Study on Preparation Process and Performance of ITO Target by Gasified Powders and Co-precipitated Powders[J]. Development and Application of Materials, 2019, 34(3): 76-80. DOI: 10.19515/j.cnki.1003-1545.2019.03.013
Citation: YANG Shuo, LIU Guanpeng, ZHAO Yanfei, DUAN Haiyang, ZHANG Weiming. Comparison Study on Preparation Process and Performance of ITO Target by Gasified Powders and Co-precipitated Powders[J]. Development and Application of Materials, 2019, 34(3): 76-80. DOI: 10.19515/j.cnki.1003-1545.2019.03.013

Comparison Study on Preparation Process and Performance of ITO Target by Gasified Powders and Co-precipitated Powders

  • Under the same technological conditions, ITO targets were prepared with gasified ITO powders and co-precipitated ITO powders by such processes as ball-milling, prilling and molding. The main performances of intermediate products and targets prepared by gasified and co-precipitated powders were studied. The result shows that after mould pressing and CIP, the density of ITO green body prepared from co-precipitated powders is lower than that of ITO green body from gasified powders. The grain size and sintering activity of the co-precipitated power are smaller and higher, so the targets of high density could be obtained under less demanding conditions.
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