一种热加工钽板材的织构分析

Texture Analysis on the Hot Worked Tantalum Sheets

1. Ningxia Orient Tantalum Industry Co., Ltd., Shizuishan 753000, China;
2. State Key Laboratory of Rare Metal Special Materials, Northwest Rare Metal Material Research Institute Ningxia Co., Ltd., Shizuishan 753000, China;
3. National Tantalum&Niobium Special Metal Material Engineering Technology Research Center, Shizuishan 753000, China

摘要: 对2枚12英寸钽板材进行了全面的织构分析，并与制备工艺、评价结果相结合，讨论三者之间的关系。制备工艺决定了织构组份，并通过织构分析全面展现二者关系，最后通过评价来进行验证。钽板材使用1 000℃热加工工艺制备，{100}织构占优，织构分布均匀性改善明显，但最终因溅射薄膜均匀性（Uniformity）不良未通过评价，此外，与溅射机台Base Line钽板材织构组份不匹配也是主要原因。
- 热加工 /
- 钽板材 /
- 织构分析 /
- 测试评价
Abstract: A comprehensive texture analysis on two pieces of 12-inch tantalum sheets was carried out, and the relationship among preparation process, evaluation results and texture analysis was discussed. The preparation process determined the texture components, and their relationship could be comprehensively displayed through texture analysis, which would be verified by evaluation. The tantalum sheets were prepared by hot worked process at 1 000℃, and the {100} texture component was dominant. The uniformity of texture distribution was improved significantly. However, the test evaluation failed because of the poor uniformity of sputtering film. In addition, the mismatch of the texture components with Base Line tantalum targets was also a main reason.
- hot worked /
- tantalum sheets /
- texture analysis /
- test evaluation

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