Abstract: ITO targets were prepared under the same technological conditions with gasified ITO powders and co-precipitated powders, respectively. The effect of two different kinds of raw powders on the microstructure of ITO target was comparatively studied. The result shows that when the ITO targets are sintered at 1 550℃/1 530℃ for 20 hours in 0.6 MPa oxygen atmosphere, the densities of the two kinds of targets are at same high level and the grain sizes are basically equal, the sizes of the intragranular microparticles in target prepared by gasified powders are smaller than those prepared by co-precipitated powders, but the degree of aggregation of microparticles in the former is higher than that in the latter. When the ITO target is sintered at 1 550℃ for 20 hours in normal oxygen atmosphere, the density of the target prepared by co-precipitated powders is higher that prepared by gasified powders while the grain sizes of the two kinds of targets which contain a few large grains are basically equal. The former is completely dense while the latter is not. The sizes of the intragranular microparticles in target prepared by gasified powders are smaller than those prepared by co-precipitated powders and the degree of aggregation of microparticles in the former is higher than that in the latter.