Influence of Heat Treatment on Crystal Structures and Luminescence Properties of ZnO Films Prepared by Sol-gel Method
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摘要: 采用溶胶-凝胶(Sol-Gel)旋涂法在Si(100)衬底上制备ZnO薄膜,利用X射线衍射(XRD)、光致发光谱(PL)、扫描电子显微镜(SEM)等手段分析制得的ZnO薄膜的晶体结构和发光特性。着重考察了热分解温度对ZnO薄膜晶体结构和发光特性的影响。结果表明,溶胶-凝胶旋涂法制备的ZnO薄膜样品厚度约为220nm,属六方纤锌矿结构,其c轴取向度与热分解温度有很大关系;ZnO薄膜在室温下均有较强的紫外带边发射峰,且紫外带边发射峰与样品c轴取向度没有直接关系,与缺陷有关的可见发射带很弱。Abstract: ZnO films were prepared with sol-gel spin-coating method on Si(100) substrates.The crystal structures and luminescence properties of ZnO films were investigated by means of X-ray diffraction(XRD),photoluminescence(PL) and scan electron microscopy(SEM).The results showed that the thickness of ZnO films was about 220 nm with hexagonal wurtzite structures and the heat treatment temperature had great effect on c axis orientation.The PL spectra of the prepared ZnO films exhibited a strong UV emission that was not directly associated with the c axis orientation and a very weak visible luminescence band related to defects.
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Key words:
- ZnO thin films /
- Crystal structure /
- Photoluminescence
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