Research on Low-temperature Sintering of Boracic Silicate Glass
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摘要: 莫来石陶瓷材料作为高性能集成电路的候选材料,在电子封装基片领域有着广阔的应用前景,但过高的烧结温度限制了其发展。本文利用溶胶-凝胶法制备能够在低温实现烧结的硼硅酸盐玻璃,作为引入相以实现莫来石陶瓷封装材料的低温共烧,通过研究CaO、B2O3、SiO2的不同组成并引入ZnO、P2O5作为助烧剂,最终制得了能够在800℃实现低温烧结的硼硅酸盐玻璃,其线性收缩率约为22.4%~24.0%,表观密度为2.21±0.1,ε=4.1±0.2,tgδ<0.06%,Rj>1.0×1012Ω.cm。Abstract: As mullite ceramic becomes a candidate material for high-capability IC,its foreground becomes wide in the area of electric package substrate,while over-high sintering temperature limits its development.Boracic silicate glass which can be sintered at low temperature was prepared by sol-gel process.Mullite ceramic can be sintered at low temperature when the boracic silicate glass is introduced into it.Proportion of CaO,B2O3,SiO2 was studied and ZnO,P2O5 was introduced,and then boracic silicate glass sintered at 800℃ with excellent dielectric properties of linearity shrink rate=22.4%~24.0%,surface ρ=2.21±0.1g/cm3,ε=4.1±0.2,tgδ<0.06%,Rj>1.0×1012Ω·cm was obtained.
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Key words:
- Mullite ceramic /
- Sol-gol process /
- LTCC /
- Boracic silicate glass
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