新型溶胶-凝胶工艺制备La0.5Ca0.5MnO3薄膜及性能分析

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新型溶胶-凝胶工艺制备La_0.5Ca_0.5MnO₃薄膜及性能分析

基金项目:

航天支撑基金,经费号:2009613305

Chemical Engineering Department, Northwest Polytechnical University, Xian 710129, China

摘要: 鉴于以醇盐为原料溶胶-凝胶制备La_0.5Ca_0.5MnO₃薄膜工艺中存在诸多苛刻因素,本文以无机盐为原料采用溶胶-凝胶工艺在SiO₂/Si(100)衬底上制备了La_0.5Ca_0.5MnO₃薄膜。并用XRD、SEM和TEM等分析手段对薄膜进行了表征,通过不同磁场下电阻-温度(R-T)曲线,研究了样品的磁电阻(CMR)效应。结果表明:薄膜具有假立方钙钛矿晶体结构,表面良好晶粒平均约为30nm且随退火温度的升高而增大;四探针法测定0.6μm厚度的La_0.5Ca_0.5MnO₃薄膜室温下的电阻率为0.0303Ω·cm;磁电阻在210K峰值达到14.5%。
- 溶胶-凝胶工艺 /
- La_0.5Ca_0.5MO₃薄膜 /
- 阻温特性
Abstract: Basing on improving harsh terms of alkoxide sol-gel process,dense conductive La_0.5Ca_0.5MnO₃ films on SiO₂/Si(110) silicon substrates were fabricated by sol-gel method with corresponding inorganic salts.The samples were characterised by means of X-ray diffraction,SEM and TEM.CMR effect of the sample were studied against R-T curves.The results show that the films have a pseudocubic perovskite structure with uniform surface and grain size(about 30nm) was increased with annealing temperature.The resistivity at room temperature of La_0.5Ca_0.5MnO₃ film was 0.0303Ω·cm by four-probe method.Magnetoresistance peak at 210K reached 14.5%.
- Sol-gel Method /
- La_0.5Ca_0.5MO₃ Film /
- Resistance-temperature property