Experimental Study on Preparation of AZO Target under Different Sintering Atmosphere
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摘要: 采用机械混粉、造粒、模压和冷等静压(CIP)成型相结合的功能陶瓷制备工艺制备了AZO靶材,研究了空气、真空及惰性气氛对AZO靶材性能的影响。结果发现,氩气保护烧结法制备的AZO靶材不仅密度高,电阻率达10-4Ω.cm量级,而且该方法还可明显抑制氧化锌的挥发,降低烧结温度,在1320℃的温度下便可制得相对密度为99%、晶粒度在4μm左右的靶材。Abstract: The influence of sintering atmosphere such as air sintering,vacuum sintering and inert gases sintering were studied on the properties of AZO targets prepared by the technics of mechanical mixing,granulation,stamping process and CIP.The results showed that the relative density of the AZO target prepared by inert gases sintering was higher than that of the others with the resistivity up to 10-4Ω·cm.This method restrained the volatilization of ZnO,decreased the sintering temperature of AZO target.At 1320℃,the relative density of 99% and the crystal size about 4μm were obstained.
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Key words:
- AZO target /
- AZO film /
- Cold isostatic pressing /
- Inert gases
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