Effect of Catalyst at Different Etched Time on the Morphology of Carbon Nanotubes
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摘要: 采用等离子体增强化学气相沉积技术,以C2H2、H2和N2为反应气体,制备出碳纳米管薄膜。利用扫描电镜(SEM)和拉曼光谱仪对其进行表征,研究刻蚀时间对碳纳米管形貌的影响。结果表明:催化剂刻蚀时间对碳纳米管薄膜的生长起着重要作用,刻蚀时间为10 min时可获得定向性好、密度适中、杂质缺陷少的碳纳米管。Abstract: Carbon nanotubes are obtained with acetylene,hydrogen and nitrogen as reactant gases by a technology of plasma enhanced chemical vapor deposition and were characterized by means of scanning electron microscopy(SEM) and Raman spectrometer.The results show that catalyst etched time plays important role in the grown of carbon nanotubes and the optimum etched time of the carbon nantubes with vertical arrangement,moderate density,few impurity and defect is 10 minutes.
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Key words:
- carbon nanotube /
- etched time /
- SEM
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