Processing Technology of Spin Coating Process Niobium Target
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摘要: 研究了靶材不同加工工艺的组织,通过多向锻造,在变形量为80%,热处理工艺为1 050℃×90 min,制得的靶材具有均匀的等轴晶组织,晶粒尺寸40—100μm。Abstract: Structures of spin coating niobium target from different processing technologies were studied. The results showed that through muti-direction forging, with the deformation of 80% and heat treatment process of 1050℃ × 90 min, the prepared targets have a homogeneous equiaxed structure and a grain size of 40-100 μm.
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Key words:
- spin coating niobium target /
- process control /
- grain size
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