Volume 18 Issue 5
Jun.  2024
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Wang Junshi, Liu Xianghuai, Huang Nan, Sun Hong, Wang Lianghui. An Investigation on the TiN Film Prepared by Means of PIII-IBAD[J]. Development and Application of Materials, 2003, 18(5): 17-20. DOI: 10.19515/j.cnki.1003-1545.2003.05.005
Citation: Wang Junshi, Liu Xianghuai, Huang Nan, Sun Hong, Wang Lianghui. An Investigation on the TiN Film Prepared by Means of PIII-IBAD[J]. Development and Application of Materials, 2003, 18(5): 17-20. DOI: 10.19515/j.cnki.1003-1545.2003.05.005
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An Investigation on the TiN Film Prepared by Means of PIII-IBAD

  • 1. Southwest Jiaotong University, Chengdu 610031, China;

  • 2. Shanghai Institute of Microsystem and Information, Shanghai 200050, China

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  • Received Date: February 20, 2003
  • Available Online: June 14, 2024
    Graphical Abstract
    • Abstract
  • The TiN film is prepared on the substrate of Cr12MoV steel by means of plasma immersion ion implantation-ion beam assisted deposition (PIII-IBAD). The structure and the tribological property including microhardness, friction coefficient and wearing traces are investigated respectively with X-ray photoelectron spectroscopy (XPS), hardness tester, sliding friction tests and scanning electron microscopy (SEM). The results indicate that the structure of the film is consisted of TiN, TiO2 and Ti2O3 and the film possesses high hardness up to Hv3200 and high wearing capacity.
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