ZHOU Shao-bo, WANG Shuang-bao, CHEN Si-hai, YI Xin-jian. Fabrication of Polycrystalline VOx Films through Reactive Ion-beam Sputtering and Reductive Annealing[J]. Development and Application of Materials, 2004, 19(6): 20-21,29. DOI: 10.19515/j.cnki.1003-1545.2004.06.006
Citation: ZHOU Shao-bo, WANG Shuang-bao, CHEN Si-hai, YI Xin-jian. Fabrication of Polycrystalline VOx Films through Reactive Ion-beam Sputtering and Reductive Annealing[J]. Development and Application of Materials, 2004, 19(6): 20-21,29. DOI: 10.19515/j.cnki.1003-1545.2004.06.006

Fabrication of Polycrystalline VOx Films through Reactive Ion-beam Sputtering and Reductive Annealing

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  • Received Date: March 18, 2004
  • Available Online: June 17, 2024
  • VOx films for high-quality microbolometer are fabricated through reactive ion beam sputterring and reductive annealing.SEM images of deposited sample and annealed sample indicate that polycrystalline VOx films are smooth and compact,and grain size becomes bigger during reductive annealing process. The sheet resistance of the films is detected to be about 50kΩ and temperature coefficient of resistance is near -0.022/K which meet the requirements of high-quality microbolometer.
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