Fabrication of Polycrystalline VO_x Films through Reactive Ion-beam Sputtering and Reductive Annealing

VO_x films for high-quality microbolometer are fabricated through reactive ion beam sputterring and reductive annealing.SEM images of deposited sample and annealed sample indicate that polycrystalline VO_x films are smooth and compact,and grain size becomes bigger during reductive annealing process. The sheet resistance of the films is detected to be about 50kΩ and temperature coefficient of resistance is near -0.022/K which meet the requirements of high-quality microbolometer.