Volume 34 Issue 1
Feb.  2019
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LI Zhaobo, MA Xiaowen, HUANG Hao, DU Linghui, WANG Kai, LI Xingyu. Analysis of Cause of Stripe in Sputter Coating Niobium Target Surface[J]. Development and Application of Materials, 2019, 34(1): 11-15. DOI: 10.19515/j.cnki.1003-1545.2019.01.003
Citation: LI Zhaobo, MA Xiaowen, HUANG Hao, DU Linghui, WANG Kai, LI Xingyu. Analysis of Cause of Stripe in Sputter Coating Niobium Target Surface[J]. Development and Application of Materials, 2019, 34(1): 11-15. DOI: 10.19515/j.cnki.1003-1545.2019.01.003
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Analysis of Cause of Stripe in Sputter Coating Niobium Target Surface

  • 1. Ningxia Orient Tantalum Industry Co., Ltd., Shizuishan 753000, China;

  • 2. State Key Laboratory of Rare Metal Special Materials, Northwest Rare Metal Material Research Institute Ningxia Co., Ltd., Shizuishan 753000, China;

  • 3. National Tantalum & Niobium Special Metal Material Engineering Technology Research Center, Shizuishan 753000, China

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  • Received Date: May 10, 2018
  • Available Online: March 15, 2024
    Graphical Abstract
    • Abstract
  • The cause of stripe in sputter coating niobium target surface during the industrial production practice was analyzed from aspects of metallographic structure distribution, texture component distribution and impurity content distribution.Resultsshowed that the nonuniform chemical composition distribution and impurity concentration in the ingot caused strips in the niobium target surface, and the stripes could be avoided by eliminating chemical composition non-uniformity and impurity richness in the ingot.
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