Analysis of Cause of Stripe in Sputter Coating Niobium Target Surface

The cause of stripe in sputter coating niobium target surface during the industrial production practice was analyzed from aspects of metallographic structure distribution, texture component distribution and impurity content distribution.Resultsshowed that the nonuniform chemical composition distribution and impurity concentration in the ingot caused strips in the niobium target surface, and the stripes could be avoided by eliminating chemical composition non-uniformity and impurity richness in the ingot.