Methods of Extracting and Analyzing of Second-phase of ITO Target

Corrosion product was prepared by sifting out and eroding crushed ITO target powders with aqua regia. Morphologies, structures and components of corrosion products of foreign targets of target-A, target-B and target-C were studied by SEM, TEM and XRD.Resultsshowed that the products were second-phase; the second-phase of target-A was approximate equiaxed, which was considered as In₄Sn₃O₁₂ and the second-phase of target-B and target-C contain both approximate isometric In₄Sn₃O₁₂ and narrow slice In₂SnO₅; the amount of second-phase of target-A was 8.32% more than that of target-B and 4.48% that of target-C.