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YANG Shuo, XUE Jianqiang, SHI Linpu. Methods of Extracting and Analyzing of Second-phase of ITO Target[J]. Development and Application of Materials, 2019, 34(1): 45-49. DOI: 10.19515/j.cnki.1003-1545.2019.01.009
Citation: YANG Shuo, XUE Jianqiang, SHI Linpu. Methods of Extracting and Analyzing of Second-phase of ITO Target[J]. Development and Application of Materials, 2019, 34(1): 45-49. DOI: 10.19515/j.cnki.1003-1545.2019.01.009
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Methods of Extracting and Analyzing of Second-phase of ITO Target

  • Luoyang Ship Material Research Institute, Luoyang 471023, China

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  • Received Date: June 13, 2018
  • Available Online: March 15, 2024
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  • Corrosion product was prepared by sifting out and eroding crushed ITO target powders with aqua regia. Morphologies, structures and components of corrosion products of foreign targets of target-A, target-B and target-C were studied by SEM, TEM and XRD.Resultsshowed that the products were second-phase; the second-phase of target-A was approximate equiaxed, which was considered as In4Sn3O12 and the second-phase of target-B and target-C contain both approximate isometric In4Sn3O12 and narrow slice In2SnO5; the amount of second-phase of target-A was 8.32% more than that of target-B and 4.48% that of target-C.
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