The Study on Thermoelectric Properties of (La_1-xCa_x)VO₃（0≤x≤1） Films by Combinatorial Pulsed Laser Deposition

La_1-xCaxVO₃ composition-spread films were fabricated by combinatorial pulsed laser deposition and their thermoelectric properties were evaluated paralelly by the multi-channel thermoelectric measurement system.Concurrent X-ray analysis verified the formation of solid soluted films in the full composition range(0≤x≤1) as judged from the linear variation of the lattice constants.The power coefficient of 0.6 μW/cm K2 was achieved in LaVO₃ film at 800℃.Large TE properties in vanadium oxide system can be expected with the change of vanadium ion valence from 3+ to 2+.